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	All over wafer	device layer	buried oxided layer	handle layer
Grade	resisitivity	Geometric parameter	Dimeter	Type/dopant	Orientaion	thickness	thickness	Orientaion	Surface/Roughness
Bonding SOI wafer	customization	TTV < 5um Bow< 40um warp <40um	25.4mm 50.8mm 76.5mm	P(Boron) N(Phos/As/Sb)	<100> <111> or special orientation	1-30+/-1um customization	0.1-7um	<100> <111> or special orientation	polished/polished
customization	TTV < 5um Bow< 40um warp <40um	100mm 125mm	P(Boron) N(Phos/As/Sb)	<100> <111> or special orientation	1-30um customization	0.1-7um	<100> <111> or special orientation	polished/etched polished/polished
customization	TTV < 5um Bow< 40um warp <40um	150mm	P(Boron) N(Phos/As/Sb)	<100> <111> or special orientation	1-30um customization	0.1-7um	<100> <111> or special orientation	polished/etched polished/polished
customization	TTV < 5um Bow< 40um warp <40um	200mm	P(Boron) N(Phos/As/Sb)	<100> <111> or special orientation	1-30um customization	0.1-7um	<100> <111> or special orientation	polished/etched polished/polished
SIMOX SOI wafer	customization	TTV < 5um Bow< 20um Warp <20um	25.4mm 50.8mm 76.5mm	P(Boron) N(Phos/As/Sb)	<100> <111> or special orientation	10-500nm	0.1-7um	<100> <111> or special orientation	polished/etched polished/polished
customization	TTV < 5um Bow< 20um Warp <20um	100mm 125mm 150mm	P(Boron) N(Phos/As/Sb)	<100> <111> or special orientation	10-500nm	0.1-7um	<100> <111> or special orientation	polished/etched polished/polished
customization	TTV < 5um Bow< 20um Warp <20um	200mm	P(Boron) N(Phos/As/Sb)	<100> <111> or special orientation	10-500nm	0.1-7um	<100> <111> or special orientation	polished/etched polished/polished
customization	TTV < 5um Bow< 20um Warp <20um	300mm	P(Boron) N(Phos/As/Sb)	<100> <111> or special orientation	10-500nm	0.1-7um	<100> <111> or special orientation	polished/etched polished/polished
Pattern Bonding SOI wafer (pattern customization)	customization	TTV < 5um Bow< 40um warp <40um	25.4mm 50.8mm 76.5mm	P(Boron) N(Phos/As/Sb)	<100> <111> or special orientation	customization	0.0001 - 200 Ohm-cm /Customization	<100> <111> or special orientation	polished/etched polished/polished
customization	TTV < 5um Bow< 40um warp <40um	100mm 125mm 150mm	P(Boron) N(Phos/As/Sb)	<100> <111> or special orientation	customization	0.0001 - 200 Ohm-cm /Customization	<100> <111> or special orientation	polished/etched polished/polished
customization	TTV < 5um Bow< 40um warp <40um	200mm	P(Boron) N(Phos/As/Sb)	<100> <111> or special orientation	customization	0.0001 - 200 Ohm-cm /Customization	<100> <111> or special orientation	polished/etched polished/polished
customization	TTV < 5um Bow< 40um warp <40um	300mm	P(Boron) N(Phos/As/Sb)	<100> <111> or special orientation	customization	0.0001 - 200 Ohm-cm /Customization	<100> <111> or special orientation	polished/etched polished/polished
Silicon On Silicon	customization	TTV < 5um Bow< 20um Warp <20um	25.4mm 50.8mm 76.5mm	P(Boron) N(Phos/As/Sb)	<100> <111> or special orientation	customization	0.0001 - 200 Ohm-cm /Customization	<100> <111> or special orientation	polished/etched polished/polished
customization	TTV < 5um Bow< 20um Warp <20um	100mm 125mm 150mm	P(Boron) N(Phos/As/Sb)	<100> <111> or special orientation	customization	0.0001 - 200 Ohm-cm /Customization	<100> <111> or special orientation	polished/etched polished/polished
customization	TTV < 5um Bow< 20um Warp <20um	200mm	P(Boron) N(Phos/As/Sb)	<100> <111> or special orientation	customization	0.0001 - 200 Ohm-cm /Customization	<100> <111> or special orientation	polished/etched polished/polished
customization	TTV < 5um Bow< 20um Warp <20um	300mm	P(Boron) N(Phos/As/Sb)	<100> <111> or special orientation	customization	0.0001 - 200 Ohm-cm /Customization	<100> <111> or special orientation	polished/etched polished/polished
Silicon-on-Glass(SOG)	customization		100mm 125mm 150mm			1 - 300um
		100mm 125mm 150mm			100 -1000nm
Gemanium-on-Insulator(GeOI)	customization		100mm 125mm 150mm			1 - 300um
		100mm 125mm 150mm			100 -1000nm
		100mm 125mm 150mm			customization
Sappire on Silicon(SOS)	customization		100mm 125mm 150mm			1 - 300um
		100mm 125mm 150mm			100 -1000nm
		100mm 125mm 150mm			customization
Sappire on Glass(SOG)	customization		100mm 125mm 150mm			1 - 300um
		100mm 125mm 150mm			100 -1000nm

Bonding SOI wafer

customization

TTV < 5um Bow< 40um warp <40um

25.4mm 50.8mm 76.5mm

P(Boron) N(Phos/As/Sb)

<100> <111> or special orientation

1-30+/-1um customization

0.1-7um

<100> <111> or special orientation

polished/polished

customization

TTV < 5um Bow< 40um warp <40um

100mm 125mm

P(Boron) N(Phos/As/Sb)

<100> <111> or special orientation

1-30um customization

0.1-7um

<100> <111> or special orientation

polished/etched polished/polished

customization

TTV < 5um Bow< 40um warp <40um

150mm

P(Boron) N(Phos/As/Sb)

<100> <111> or special orientation

1-30um customization

0.1-7um

<100> <111> or special orientation

polished/etched polished/polished

customization

TTV < 5um Bow< 40um warp <40um

200mm

P(Boron) N(Phos/As/Sb)

<100> <111> or special orientation

1-30um customization

0.1-7um

<100> <111> or special orientation

polished/etched polished/polished

SIMOX SOI wafer

customization

TTV < 5um Bow< 20um Warp <20um

25.4mm 50.8mm 76.5mm

P(Boron) N(Phos/As/Sb)

<100> <111> or special orientation

10-500nm

0.1-7um

<100> <111> or special orientation

polished/etched polished/polished

customization

TTV < 5um Bow< 20um Warp <20um

100mm 125mm 150mm

P(Boron) N(Phos/As/Sb)

<100> <111> or special orientation

10-500nm

0.1-7um

<100> <111> or special orientation

polished/etched polished/polished

customization

TTV < 5um Bow< 20um Warp <20um

200mm

P(Boron) N(Phos/As/Sb)

<100> <111> or special orientation

10-500nm

0.1-7um

<100> <111> or special orientation

polished/etched polished/polished

customization

TTV < 5um Bow< 20um Warp <20um

300mm

P(Boron) N(Phos/As/Sb)

<100> <111> or special orientation

10-500nm

0.1-7um

<100> <111> or special orientation

polished/etched polished/polished

Pattern Bonding SOI wafer (pattern customization)

customization

TTV < 5um Bow< 40um warp <40um

25.4mm 50.8mm 76.5mm

P(Boron) N(Phos/As/Sb)

<100> <111> or special orientation

customization

0.0001 - 200 Ohm-cm /Customization

<100> <111> or special orientation

polished/etched polished/polished

customization

TTV < 5um Bow< 40um warp <40um

100mm 125mm 150mm

P(Boron) N(Phos/As/Sb)

<100> <111> or special orientation

customization

0.0001 - 200 Ohm-cm /Customization

<100> <111> or special orientation

polished/etched polished/polished

customization

TTV < 5um Bow< 40um warp <40um

200mm

P(Boron) N(Phos/As/Sb)

<100> <111> or special orientation

customization

0.0001 - 200 Ohm-cm /Customization

<100> <111> or special orientation

polished/etched polished/polished

customization

TTV < 5um Bow< 40um warp <40um

300mm

P(Boron) N(Phos/As/Sb)

<100> <111> or special orientation

customization

0.0001 - 200 Ohm-cm /Customization

<100> <111> or special orientation

polished/etched polished/polished

Silicon On Silicon

customization

TTV < 5um Bow< 20um Warp <20um

25.4mm 50.8mm 76.5mm

P(Boron) N(Phos/As/Sb)

<100> <111> or special orientation

customization

0.0001 - 200 Ohm-cm /Customization

<100> <111> or special orientation

polished/etched polished/polished

customization

TTV < 5um Bow< 20um Warp <20um

100mm 125mm 150mm

P(Boron) N(Phos/As/Sb)

<100> <111> or special orientation

customization

0.0001 - 200 Ohm-cm /Customization

<100> <111> or special orientation

polished/etched polished/polished

customization

TTV < 5um Bow< 20um Warp <20um

200mm

P(Boron) N(Phos/As/Sb)

<100> <111> or special orientation

customization

0.0001 - 200 Ohm-cm /Customization

<100> <111> or special orientation

polished/etched polished/polished

customization

TTV < 5um Bow< 20um Warp <20um

300mm

P(Boron) N(Phos/As/Sb)

<100> <111> or special orientation

customization

0.0001 - 200 Ohm-cm /Customization

<100> <111> or special orientation

polished/etched polished/polished

Silicon-on-Glass(SOG)

customization

100mm 125mm 150mm

1 - 300um

100mm 125mm 150mm

100 -1000nm

Gemanium-on-Insulator(GeOI)

customization

100mm 125mm 150mm

1 - 300um

100mm 125mm 150mm

100 -1000nm

100mm 125mm 150mm

customization

Sappire on Silicon(SOS)

customization

100mm 125mm 150mm

1 - 300um

100mm 125mm 150mm

100 -1000nm

100mm 125mm 150mm

customization

Sappire on Glass(SOG)

customization

100mm 125mm 150mm

1 - 300um

100mm 125mm 150mm

100 -1000nm

Silicon-On-Insulator(SOI) wafers

Contact info

Specification for Silicon-On-Insulator(SOI) Wafer